HaloVac®精密真空泵油是专为精密真空泵应用中所需的低蒸汽压和粘度特性而设计的氟化润滑剂。 HaloVac® oils are designed for use as nonflammable and nonreactive lubricants in continuous operations that involve oxidizing environments, or hazardous chemicals. HaloVac® oils are routinely used in applications ranging from plasma etching and chemical vapor deposition in semiconductor fabrication to the vacuums used reactive gas handling and electron microscopy. These oils significantly reduce the safety and exposure risks associated with the routine operation, maintenance, and waste disposal common in these applications.
Key Performance Characteristics:
Chemically inert
Non-toxic
No sludge-formation
Nonflammable (no flash or fire point)
High thermal stability
Exceptional resistance to Lewis-Acids
Low vapor pressure
underwent no weight loss
did not experience a reduction in viscosity
had no change in pH, and no increase in acidity
encapsulated volatile organic compound
emitted no discernable fumes or acidic odors